Accuracy barriers of quantitative electron beam x-ray microanalysis - Foreword

Barriers to Quantitative Electron Probe X-Ray Microanalysis for Low Voltage Scanning Electron Microscopy

Low voltage x-ray microanalysis, defined as being performed with an incident beam energy ≤5 keV, can achieve spatial resolution, laterally and in depth, of 100 nm or less, depending on the exact selection of beam energy and the composition of the target. The shallow depth of beam penetration, with the consequent short path length for x-ray absorption, and the low overvoltage, the ratio of beam ...

X-ray microanalysis attachment for electron microscope.

Fundamental Constants for Quantitative X-ray Microanalysis.

Quantitative X-ray microanalysis requires the use of many fundamental constants related to the interaction of the electron beam with the sample. The current state of our knowledge of such constants in the particular areas of electron stopping power, X-ray ionization cross-sections, X-ray fluorescence yield, and the electron backscattering yield, is examined. It is found that, in every case, the...

Quantitative Electron Probe Microanalysis

The recognition and understanding of the role of the microstructure in controlling the macroscopic behavior of a material has been a major theme of science and technology throughout the history of NBS/NIST. In materials science, the late 19th century saw the development of the sample preparation procedures we know today as “metallography” and “materialography,” and the emergence of optical micr...

Quantitative X-ray microanalysis of thin specimens in the transmission electron microscope; a review

In a thin specimen X-ray absorption and fluorescence can, to a first approximation, be ignored and the observed X-ray intensity ratios, Ia/Ie, can be converted into weight fraction ratios, CA/CB, by multiplying by a constant kaB; CA/C B = kAB I A/IB. kAB values can be calculated or determined experimentally. The major correction which may have to be made to the calculated weight fraction ratio ...